Paper
13 December 2024 Design of a novel UTC-PD-array’s structure for power combining above 110GHz
Da-bao Yang, Dong Xing, Bo Liu, Xiang-yang Zhao, Xing-ye Zhou, Zhihong Feng
Author Affiliations +
Proceedings Volume 13502, AOPC 2024: AI in Optics and Photonics; 135020H (2024) https://doi.org/10.1117/12.3047246
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China
Abstract
A novel uni-traveling-carrier photodiode (UTC-PD) array’s structure for power combining above 110GHz was designed and fabricated to extend a single PD’s power limit in the THz regime. Four identical monolithically integrated UTC-PDs’ power was combined with T-junctions connecting every 6.5µm-diameter anode of these InGaAs-InP PDs. All PDs and combiner were fabricated on a 12µm-thick InP substrate, and the fulfilled chip was then measured after flip-chip bonding on a 50µm-thick AlN-based coplanar waveguide circuit. A continuous wave output power 0.19mW was measured at an operating frequency of 112GHz with a bias voltage of -3V.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
Da-bao Yang, Dong Xing, Bo Liu, Xiang-yang Zhao, Xing-ye Zhou, and Zhihong Feng "Design of a novel UTC-PD-array’s structure for power combining above 110GHz", Proc. SPIE 13502, AOPC 2024: AI in Optics and Photonics, 135020H (13 December 2024); https://doi.org/10.1117/12.3047246
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KEYWORDS
Terahertz radiation

Design

3D modeling

Absorption

Anodes

Beam combiners

Palladium

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