Expert system for performing measurement system characterization

Robert R. Hershey; Terrence E. Zavecz

doi:10.1117/12.59815

1 June 1992 Expert system for performing measurement system characterization

Proceedings Volume 1673, Integrated Circuit Metrology, Inspection, and Process Control VI; (1992) https://doi.org/10.1117/12.59815
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

The considerations which drive an expert system for assisting in measurement system characterization are described. The expert system employs several novel techniques for evaluating the integrity of a characterization analysis by determining the degree to which critical assumptions are satisfied and flagging weak points in the data collection or analysis procedure. The properties of good characterization sampling plans are derived. Methods for formulating reliable characterization studies are described. The paper focuses on short term studies intended for equipment comparisons and calibrations; however, with minor alterations it can be expanded to include longer term stability studies.

Citation Download Citation

Robert R. Hershey and Terrence E. Zavecz "Expert system for performing measurement system characterization", Proc. SPIE 1673, Integrated Circuit Metrology, Inspection, and Process Control VI, (1 June 1992); https://doi.org/10.1117/12.59815

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