Growth of ceramic thin films by pulsed laser deposition: the role of the kinetic energy of laser-ablated particles

Jens Gottmann; Thomas Klotzbuecher; Ernst-Wolfgang Kreutz

doi:10.1117/12.308606

26 May 1998 Growth of ceramic thin films by pulsed laser deposition: the role of the kinetic energy of laser-ablated particles

Jens Gottmann, Thomas Klotzbuecher, Ernst-Wolfgang Kreutz

Author Affiliations +

Proceedings Volume 3404, ALT'97 International Conference on Laser Surface Processing; (1998) https://doi.org/10.1117/12.308606
Event: ALT '97 International Conference on Laser Surface Processing, 1997, Limoges, France

Abstract

Sintered targets of ZrO₂, Al₂O₃ and BaTiO₂ are ablated by KrF excimer laser radiation (lambda) equals 248 nm, (tau) equals 25 ns. The processing gas atmosphere consists of O₂ at typical pressures of 10^-3-0.5 mbar. The films are deposited on a Pt/Ti/Si multilayer substrate. The investigations concentrate on the influence of the kinetic energy of the ablated particles on the crystal structure and morphology of the forming films. The kinetic energy is described as a function of the processing gas pressure, the target-to-substrate distance and the fluence of the laser radiation on the target. The compaction of the zirconia and alumina thin films is achieved by particles impinging on the growing surface with kinetic energies above 30 eV. To deposit ferroelectric BaTiO₃ thin films at low substrate temperatures the mean kinetic energy of the Ba particles have to be < 30 eV to prevent displacements beneath the film surface. Analytical techniques used for the structural characterization of the films are X-ray diffraction, micro- Raman spectroscopy and electron microscopy. Dielectric and ferroelectric properties of the films are determined by impedance measurements. The thickness and the complex refractive index are determined by fitting a model for the film geometry to the measured ellipsometry data.

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Jens Gottmann, Thomas Klotzbuecher, and Ernst-Wolfgang Kreutz "Growth of ceramic thin films by pulsed laser deposition: the role of the kinetic energy of laser-ablated particles", Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); https://doi.org/10.1117/12.308606

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