Laser processes for prototyping and production of novel microfluidic structures

John R. Andrews; Bradley Gerner

doi:10.1117/12.524547

23 December 2003 Laser processes for prototyping and production of novel microfluidic structures

John R. Andrews, Bradley Gerner

Proceedings Volume 5345, Microfluidics, BioMEMS, and Medical Microsystems II; (2003) https://doi.org/10.1117/12.524547
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

We describe a number of microfluidic components that have been formed by laer micromachining and incorporated in a picoliter droplet dispenser. The laser micromachined structures include an adhesive interface between macrofluidic and microfluidic regions, a particle filter, a fluid manifold, channels, and nozzles. Both excimer laser and C0₂ laser processes are used.

Citation Download Citation

John R. Andrews and Bradley Gerner "Laser processes for prototyping and production of novel microfluidic structures", Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); https://doi.org/10.1117/12.524547

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