RET for the wiring layer of a 3D memory

Yung-Tin Chen; Paul Poon; Chris Petti; Vishnu Kamat; Apo Sezginer; Hsu-Ting Huang

doi:10.1117/12.656725

14 March 2006 RET for the wiring layer of a 3D memory

Yung-Tin Chen, Paul Poon, Chris Petti, Vishnu Kamat, Apo Sezginer, Hsu-Ting Huang

Proceedings Volume 6156, Design and Process Integration for Microelectronic Manufacturing IV; 61561E (2006) https://doi.org/10.1117/12.656725
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

A typical wiring layer of SanDisk 3-dimensional memory device includes a dense array of lines. Every other line terminates in an enlarged contact pad at the edge of the array. The pitch of the pads is twice the pitch of the dense array. When process conditions are optimized for the dense array, the gap between the pads becomes a weak point. The gap has a smaller depth of focus. As defocus increases, the space between the pads diminishes and bridges. We present a method of significantly increasing the depth of focus of the pads at the end of the dense array. By placing sub-resolution cutouts in the pads, we equalize the dominant pitch of the pads and the dense array.

Citation Download Citation

Yung-Tin Chen, Paul Poon, Chris Petti, Vishnu Kamat, Apo Sezginer, and Hsu-Ting Huang "RET for the wiring layer of a 3D memory", Proc. SPIE 6156, Design and Process Integration for Microelectronic Manufacturing IV, 61561E (14 March 2006); https://doi.org/10.1117/12.656725

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available