Advances in VCSEL technologies and integrated optics

Jason Tan

doi:10.1117/12.2663001

30 April 2023 Advances in VCSEL technologies and integrated optics

Jason Tan

Proceedings Volume PC12499, Advanced Etch Technology and Process Integration for Nanopatterning XII; PC1249909 (2023) https://doi.org/10.1117/12.2663001
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

VCSEL technologies advances in Coherent Corp enabling new applications and performance. Integration of optics into VCSELs to allow beam shaping to enable better optics design and reduce package.

Conference Presentation

Citation Download Citation

Jason Tan "Advances in VCSEL technologies and integrated optics", Proc. SPIE PC12499, Advanced Etch Technology and Process Integration for Nanopatterning XII, PC1249909 (30 April 2023); https://doi.org/10.1117/12.2663001

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