Mr. Adam J. Berro Profile

Adam J. Berro

at Univ of Texas at Austin

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Author

Publications (2)

Proceedings Article | 1 April 2009 Paper

Optical threshold layer and intermediate state two-photon PAG approaches to double exposure lithography

Adam Berro, Xinyu Gu, Naphtali O'Connor, Steffen Jockusch, Tomoki Nagai, Toshiyuki Ogata, Paul Zimmerman, Bryan Rice, Elizabeth Adolph, Travis Byargeon, Jose Gonzalez, Nicholas Turro, C. Grant Willson

Proceedings Volume 7273, 72731B (2009) https://doi.org/10.1117/12.814295

KEYWORDS: Polymers, Liquids, Liquid crystals, Crystals, Lithography, Molecules, Absorption, Diffusion, Nitrogen, Absorbance

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Proceedings Article | 1 April 2009 Paper

Fundamental study of optical threshold layer approach towards double exposure lithography

Xinyu Gu, Adam Berro, Younjin Cho, Kane Jen, Saul Lee, Tomoki Ngai, Toshiyuki Ogata, William Durand, Arunkumar Sundaresan, Jeffrey Lancaster, Steffen Jockusch, Paul Zimmerman, Nicholas Turro, C. Willson

Proceedings Volume 7273, 72731C (2009) https://doi.org/10.1117/12.814298

KEYWORDS: Polymers, Lithography, Crystals, Diffusion, Temperature metrology, Extreme ultraviolet lithography, Sensors, Polymer thin films, Optical lithography, Photomasks

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