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Alan Li
at Semiconductor Manufacturing International Corp
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Author
Publications (4)
Proceedings Article | 26 September 2019 Paper
High temperature baking process study in advanced mask cleaning
Dejian Li, Fen Xue, Cong Lu, Wenjun Ling, Xuefei Qin, Jie Wang
Proceedings Volume 11148, 1114816 (2019) https://doi.org/10.1117/12.2536622
KEYWORDS: Photomasks, Ions, Air contamination, Distortion, Mask making, Semiconducting wafers, Image registration, Mask cleaning, Scanning electron microscopy, Image processing
Proceedings Article | 26 September 2019 Paper
Lithography printability review: an application on advanced photomask production for enhancing mask yield and cycle time
Proceedings Volume 11148, 1114812 (2019) https://doi.org/10.1117/12.2536494
KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Lithography, Mask making, Optical proximity correction, Manufacturing, Defect inspection, Scanners, Computer simulations
Proceedings Article | 3 October 2018 Paper
Pattern edge roughness study on OMOG mask repair
Proceedings Volume 10810, 108100Z (2018) https://doi.org/10.1117/12.2501753
KEYWORDS: Plasma, Etching, Edge roughness, Oxides, Photomasks, Oxygen, Distortion, Plasma etching
Proceedings Article | 3 October 2018 Paper
A study of the TMAH based clean performance on advanced photomask
Fen Xue, Irene Shi, Alan Li, Eric Tian, Ming Chen, Max Lu, Fei Xu, Wei Jiang, Jian Shen
Proceedings Volume 10810, 108101B (2018) https://doi.org/10.1117/12.2500804
KEYWORDS: Photomasks, SRAF, Particles, Critical dimension metrology, Semiconductors, Mask cleaning, Lithography
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