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Dr. Alexey S. Kuznetsov
at ASML Netherlands BV
SPIE Involvement:
Author
Area of Expertise:
plasma-wall interaction , hydrogen interaction with materials , thin film multilayers , EUV optics
Publications (1)
Proceedings Article | 19 May 2011 Paper
Blistering behavior in Mo/Si multilayers
A. Kuznetsov, M. Gleeson, R. W. van de Kruijs, F. Bijkerk
Proceedings Volume 8077, 807713 (2011) https://doi.org/10.1117/12.887326
KEYWORDS: Hydrogen, Ions, Scanning electron microscopy, Capillaries, Multilayers, Silicon, Diffusion, Extreme ultraviolet, Extreme ultraviolet lithography, Plasma
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