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Amol Gupta
at Applied Materials Inc
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Publications (2)
Proceedings Article | 10 April 2024 Presentation
Advancing EUV patterning through pattern shaping at Intel 18A process technology node
Robert Browning, Shurong Liang, Peter Sun, Laxmy Menon, Nadjoua Moumen, Can Guven, Nathan Strutt, Mehmet Aykol, Robert Bigwood, Sarah Williams, Kevin Anglin, Amol Gupta, Steven Sherman, Kevin Fischer, Charles Wallace, Gang Shu, Bhavin Shah, Brad Taylor
Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010982
KEYWORDS: Extreme ultraviolet, Advanced patterning, Optical lithography, Printing, Stochastic processes, Semiconducting wafers, Lithography, Design rules
Proceedings Article | 13 June 2022 Presentation
Pattern shape engineering
Shurong Liang, Amol Gupta, Steven Sherman, Kevin Anglin, Keun Hee Bai, Jong Chul Park
Proceedings Volume PC12056, PC1205602 (2022) https://doi.org/10.1117/12.2615043
KEYWORDS: Optical lithography, Extreme ultraviolet lithography, Stochastic processes, Chemistry
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