In this work, the SEMI specification for reticle and pod management (E109) with internal reticle library support has been
integrated for the first time on KLA-Tencor’s TeronTM and TeraScanTM reticle inspection tools. Manufacturing
Execution System scheduling reticle jobs and Automated Material Handling System scheduling to transfer pods
simultaneously have also been integrated and tested. GLOBALFOUNDRIES collaboratively worked with KLA-Tencor
to successfully implement these capabilities. Both library and non-library scenarios have been demonstrated for
comparison in a real production environment resulting in productivity increase of approximately 29% by making use of
the library. Reticle re-qualification test cases were used for the comparison in this work.
Especially for advanced masks the reticle inspection operation is a very significant cost factor, since it is a time
consuming process and inspection tools are becoming disproportionately expensive. Analyzing and categorizing
historical equipment utilization times of the reticle inspection tools however showed a significant amount of time which
can be classified as non productive. In order to reduce the inspection costs the equipment utilization needed to be
improved. The main contributors to non productive time were analyzed and several use cases identified, where
automation utilizing a SECS1 equipment interface was expected to help to reduce these non productive times.
The paper demonstrates how real time access to equipment utilization data can be applied to better control
manufacturing resources. Scenarios are presented where remote monitoring and control of the inspection equipment can
be used to avoid setup errors or save inspection time by faster response to problem situations. Additionally a solution to
the second important need, the maximization of tool utilization in cases where not all of the intended functions are
available, is explained. Both the models and the software implementation are briefly explained. For automation of the so
called inspection strategy a new approach which allows separation of the business rules from the automation
infrastructure was chosen.
Initial results of inspection equipment performance data tracked through the SECS interface are shown. Furthermore a
system integration overview is presented and examples of how the inspection strategy rules are implemented and
managed are given.
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