Mr. Bilal Abbas Naqvi Profile

Bilal Abbas Naqvi

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Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Reaction mechanisms and EB patterning evaluation of Sn-complex-side-chain polymer used for EUV lithography

Yui Takata, Yusa Muroya, Takahiro Kozawa, Satoshi Enomoto, Bilal Naqvi, Danilo De Simone

Proceedings Volume 12498, 1249826 (2023) https://doi.org/10.1117/12.2670173

KEYWORDS: Polymers, Extreme ultraviolet lithography, Extreme ultraviolet, Electron beam lithography, Design and modelling, Tin, Scanning electron microscopy, Internet of things, Electron beams

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