Mr. Chia-Liang Yeh Profile

Chia-Liang Yeh

Associate Engineer at Industrial Technology Research Institute

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 20 March 2020 Presentation + Paper

EUV scatterometer with multiple orders of high-harmonic generation

Y. Ku, W. Wang, Y. Chen, M. Chang, C. Yeh, C. Lo

Proceedings Volume 11325, 1132518 (2020) https://doi.org/10.1117/12.2552218

KEYWORDS: Diffraction, Diffraction gratings, Extreme ultraviolet, Sensors, Charge-coupled devices, CCD cameras, Laser scattering, Scatterometry, Metrology, CCD image sensors

Read Abstract +

SPIE Journal Paper | 24 February 2018 Open Access

Development of extreme ultraviolet scatterometer using multiple orders of high-harmonic generation

Yi-Sha Ku, Wei-Ting Wang, Yi-Chang Chen, Ming-Chang Chen, Chia-Liang Yeh, Chun-Wei Lo

JM3, Vol. 17, Issue 01, 014001, (February 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.1.014001

KEYWORDS: Diffraction, Diffraction gratings, Extreme ultraviolet, Sensors, Charge-coupled devices, CCD cameras, Laser scattering, CCD image sensors, Scatterometry, Scanning electron microscopy

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 20 August 2015 Paper

Development of EUV scatterometer with high-harmonic-generation EUV source for nano-scale grating measurement

Chia-Liang Yeh, Yi-Sha Ku, Yi-Chen Hsieh, Chia-Hung Cho

Proceedings Volume 9556, 95561F (2015) https://doi.org/10.1117/12.2194234

KEYWORDS: Extreme ultraviolet, Diffraction gratings, Diffraction, Metrology, Databases, Light sources, 3D metrology, Algorithms, Mirrors, CCD cameras

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years