Dr. Christian Lohmann Profile

Dr. Christian Lohmann

at TU Chemnitz-Zwickau

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 16 January 2003 Paper

Christian Lohmann, Andreas Bertz, Matthias Kuechler, Danny Reuter, Thomas Gessner

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472725

KEYWORDS: Silicon, Aluminum, Etching, Reliability, Semiconducting wafers, Metals, Photomasks, Sensors, Actuators, Microelectromechanical systems

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Keywords/Phrases