We report on the development and testing of a laser system that delivers up to 200 mW of continuous-wave radiation at 198.54 nm in a near diffraction-limited beam, to be used as a source for photolithography mask writing and mask inspection. The source has been developed with the support of International SEMATECH. The laser output is obtained by intra-cavity sum frequency generation in a CLBO (Cesium Lithium Borate) non-linear crystal
KEYWORDS: Semiconductor lasers, Continuous wave operation, High power lasers, Solid state lasers, Nd:YAG lasers, Solid state electronics, Crystals, Argon ion lasers, Harmonic generation, Nonlinear crystals
Recent progress in pump sources and basic materials have allowed the production of commercially viable, high-power, diode-pumped, continuous-wave, green lasers. We will review the history and the technological developments that have allowed this progress.
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