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Dr. Daan Hein Alsem
at Lawrence Berkeley National Lab
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Publications (1)
Proceedings Article | 9 February 2009 Paper
Tribological behavior of micron-scale polycrystalline silicon structural films in ambient air
D. Alsem, R. van der Hulst, E. Stach, M. Dugger, J. Th. M. De Hosson, R. Ritchie
Proceedings Volume 7206, 72060A (2009) https://doi.org/10.1117/12.808348
KEYWORDS: Silicon, Particles, Humidity, Adhesives, Microelectromechanical systems, Transmission electron microscopy, Abrasives, Surface finishing, Calibration, Scanning electron microscopy
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