Dr. Dan Yu Profile

Dr. Dan Yu

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Publications (3)

Proceedings Article | 26 May 2022 Presentation + Paper

Computation of transmission cross coefficients for pixelated illumination source

Dan Yu, Chuck Hawkinson

Proceedings Volume 12052, 120520J (2022) https://doi.org/10.1117/12.2618087

KEYWORDS: Source mask optimization, Lithography, Optimization (mathematics), Lithographic illumination, Manufacturing, Light, System on a chip, Optical lithography, Image transmission

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Proceedings Article | 22 February 2021 Presentation + Paper

The application of a new stochastic search algorithm “Adam” in inverse lithography technology (ILT) in critical recording head fabrication process

Dan Yu, Yi Liu, Chuck Hawkinson

Proceedings Volume 11613, 116130N (2021) https://doi.org/10.1117/12.2583508

KEYWORDS: Lithography, Stochastic processes, Head, Photomasks, Manufacturing, Statistical analysis, Semiconductors, Semiconductor manufacturing, Physics, Optimization (mathematics)

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Proceedings Article | 23 March 2020 Paper

Target recovery process optimization to improve image based overlay performance for critical recording head manufacturing processes

Yi Liu, Dan Yu, Aaron Bowser

Proceedings Volume 11327, 113271A (2020) https://doi.org/10.1117/12.2550782

KEYWORDS: Overlay metrology, Lithography

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