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Dr. David T. Read
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 September 2007 Paper
Microstructure of 100 nm damascene copper overburden and lines
Proceedings Volume 6648, 664808 (2007) https://doi.org/10.1117/12.735021
KEYWORDS: Copper, Scanning electron microscopy, Statistical analysis, Diffraction, Chemical mechanical planarization, Crystals, Transmission electron microscopy, Metals, Backscatter, Semiconducting wafers
Proceedings Article | 13 September 1996 Paper
Analysis of fixed-fixed beam test structures
Janet Marshall, David Read, Michael Gaitan
Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250961
KEYWORDS: Microelectromechanical systems, Structural design, Interferometers, Analytical research, Beam analyzers, Standards development, Data processing, Interferometry, Calibration, Electronics
Proceedings Article | 13 September 1996 Paper
Measurements of fracture strength and Young's modulus of surface-micromachined polysilicon
David Read, Janet Marshall
Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250967
KEYWORDS: Microelectromechanical systems, Structural design, Silicon, Standards development, Mechanics, Optical testing, Digital image correlation, Materials science, Electronics engineering, Mechanical engineering
SPIE Journal Paper | 1 May 1993
Hybrid grid-moiré method for measuring strain and displacement
M. Szanto, James Dally, David Read
OE, Vol. 32, Issue 05, (May 1993) https://doi.org/10.1117/12.10.1117/12.130250
KEYWORDS: Moire patterns, Signal to noise ratio, Video, Fourier transforms, Cameras, Image segmentation, CCD cameras, Microscopes, Standards development, Distortion
Conference Committee Involvement (1)
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
23 January 2007 | San Jose, California, United States
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