Dr. Donghyun Lee Profile

Dr. Donghyun Lee

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Local depth monitoring using scanning electron microscopy and its verification using atomic force microscopy

Inseok Park, JaeHyung Ahn, Donghyun Lee, Souk Kim, Minho Rim, Younghoon Sohn

Proceedings Volume 12496, 124962L (2023) https://doi.org/10.1117/12.2657848

KEYWORDS: Scanning electron microscopy, Atomic force microscopy, Transmission electron microscopy, Semiconducting wafers, Reliability, Metrology, Signal detection, Semiconductors, Optical transmission, Optical sensing

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