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Edmund Pierzchala
at Siemens EDA
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Publications (1)
Proceedings Article | 13 March 2009 Paper
Circuit-topology driven OPC for increased performance/yield ratio
Proceedings Volume 7275, 72751A (2009) https://doi.org/10.1117/12.814367
KEYWORDS: Optical proximity correction, Manufacturing, Clocks, Critical dimension metrology, Ions, Picosecond phenomena, Design for manufacturing, Digital electronics, Yield improvement, Logic
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