Mr. Fangrui Wu Profile

Fangrui Wu

at Shanghai Huali Integrated Circuit Corp.

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Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper

In-line monitoring of overlay and process window using design-assisted voltage contrast inspection for 14nm FINFET technology

Runling Li, I-Kai Hsu, Tomasz Brozek, Linrong Yang, Debiao He, Fangrui Wu, Jiadong Ren, Yefang Zhu, Yan Zhang, Pei Liu, Haiqiong Zhang, Guifeng Zhang, Yingying Fu, Shan Yin, Yujie Jia, Bo Yu

Proceedings Volume 12053, 120531U (2022) https://doi.org/10.1117/12.2613633

KEYWORDS: Lithography, Semiconducting wafers, Process control, Inspection, Fin field effect transistors, Optical alignment

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