Dr. Fernando A. Sigoli Profile

Dr. Fernando A. Sigoli

R&D Manager at OptiNetrics Inc

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Publications (2)

Proceedings Article | 28 May 2004 Paper

Continuous tone gray-scale photomask for deep UV lithography applications

Edgar Mendoza, Fernando Sigoli, Heidi Paulus, Luan Giang, Mahmood Seifouri, E. Lam, Lothar Kempen

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.527581

KEYWORDS: Photomasks, Photomask technology, Deep ultraviolet, Lithography, Ultraviolet radiation, Computer generated holography, Signal attenuation, Glasses, Thin films, Silica

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Proceedings Article | 17 December 2003 Paper

Continuous-tone gray-scale photomasks based on photosensitive spin-on-glass technology for deep-UV lithography applications

Edgar Mendoza, F. Sigoli, H. Paulus, L. Giang, M. Seifouri, E. Lam, Lothar Kempen, Farvardin Johansooz

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.528092

KEYWORDS: Photomasks, Photomask technology, Deep ultraviolet, Lithography, Ultraviolet radiation, Computer generated holography, Signal attenuation, Glasses, Thin films, Optical lithography

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