Dr. Haoxing Ren Profile

Dr. Haoxing Ren

at NVIDIA Corp

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Publications (1)

Proceedings Article | 30 April 2023 Presentation

Enabling scalable AI computational lithography with physics-inspired models

Haoyu Yang, Haoxing Ren

Proceedings Volume 12495, 124950O (2023) https://doi.org/10.1117/12.2656025

KEYWORDS: Visual process modeling, Lithography, Source mask optimization, Photomasks, Computational lithography, Artificial intelligence, Silicon, Semiconducting wafers, Performance modeling, Optical proximity correction

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