Dr. Hitomi Satoh Profile

Dr. Hitomi Satoh

at Holon Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 November 2005 Paper

CD measurement of angled lines on high-end masks and its calibration method

Masashi Ataka, Yasunobu Kitayama, Katsuyuki Takahashi, Naoyuki Nakamura, Izumi Santo, Hitomi Satoh, Norimichi Anazawa

Proceedings Volume 5992, 59924H (2005) https://doi.org/10.1117/12.632016

KEYWORDS: Critical dimension metrology, Calibration, Holons, Computer aided design, Standards development, Prototyping, Reliability, Data conversion, Optical proximity correction, Very large scale integration

Read Abstract +

Proceedings Article | 9 November 2005 Paper

CD measurement of points indicated in photomask writing data

Hitomi Satoh, Masashi Ataka, Norimichi Anazawa

Proceedings Volume 5992, 59924G (2005) https://doi.org/10.1117/12.632000

KEYWORDS: Scanning electron microscopy, Photomasks, Critical dimension metrology, Raster graphics, Holons, Optical proximity correction, Computed tomography, Software development, Cadmium, Semiconducting wafers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years