A processing scheme for fabricating Pb(ZrxTi1-x)O3 thin film actuated silicon cantilevers using silicon-on-insulator wafers is described. Such piezoelectrically actuated cantilevers are being investigated for RF microswitches. The microswitch design specification requires the Pb(ZrxTi1-x)O3 thin film to be at least 1μm thick to achieve the adequate deflection at an operating voltage of 10V. A two-stage dry-wet etching process was developed to reliably pattern the 1μm Pb(ZrxTi1-x)O3 film. To release the Pb(ZrxTi1-x)O3 cantilevers on silicon-on-insulator wafers it is necessary to perform deep silicon etching from both sides of the wafer. The Pb(ZrxTi1-x)O3 thin film was prepared by sol-gel method. The piezoelectric coefficient d31 was calculated as 14pC/N.
Current developments in RF systems require high-performance switches for applications including signal routing, impedance matching and adjustable gain amplifiers. The use of micro-switches to replace traditional semiconductor components is increasingly common, because of their advantages in terms of electrical isolation and power loss. This paper reports on a research program relating to the development of a silicon micro-machined RF micro-switch that uses thin-film piezoelectric material for actuation. Piezoelectric actuation has potential advantages over electrostatic actuation in terms of achievable forces and simplicity of structural design. This paper gives an overview of the design and analysis of a prototype switch. The design concept, based on a cantilevered silicon beam or plate, is described. A low order mathematical model, incorporating the mechanical and electrical characteristics of the switch and the interaction between the silicon structure and the piezo-drive is summarized. This allows the basic behavior of the switch to be quantified, and provides a useful tool for design and optimization purposes. The outline design and manufacture/processing of a prototype switch is discussed.
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