Hyungju Ahn
at Inha Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper
Yejin Ku, Hyungju Ahn, Jin-Kyun Lee, Jiho Kim, Byeong-Gyu Park, Sangsul Lee, Yu Ha Jang, Byung Jun Jung, Chawon Koh, Tsunehiro Nishi, Hyun-Woo Kim
Proceedings Volume 12498, 1249816 (2023) https://doi.org/10.1117/12.2658210
KEYWORDS: Photoresist materials, Extreme ultraviolet lithography, Polymers, Extreme ultraviolet, Thin films, Lithography, Tin

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