Mr. Hyun-Gyu Kang Profile

Hyun-Gyu Kang

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

Unraveling strength and mechanical properties of CNT-based EUV pellicle

Hyun-Gyu Kang, Ivan Pollentier, Marina Timmermans, Steven Brems, Emily Gallagher

Proceedings Volume 12953, 129530M (2024) https://doi.org/10.1117/12.3010378

KEYWORDS: Pellicles, Extreme ultraviolet lithography, Scanners, Permeability, Extreme ultraviolet, Plasma, Materials properties, Resistance, Hydrogen, Fabrication

Read Abstract +

Proceedings Article | 1 December 2022 Paper

Removal behavior of Sn and Pb contaminants on EUV mask after EUV exposure

Dong-Hyeon Kwon, Hyun-Gyu Kang, Tae-Gon Kim, Jin-Ho Ahn, Sang-Sul Lee, Jin-Goo Park

Proceedings Volume 12293, 122930B (2022) https://doi.org/10.1117/12.2641800

KEYWORDS: Particles, Tin, Lead, Ruthenium, Extreme ultraviolet lithography, Silicon, Atomic force microscopy, Extreme ultraviolet

Read Abstract +

Proceedings Article | 16 November 2022 Presentation

Damage-free pinpoint particle removal for EUV pellicle cleaning

Hyun-Gyu Kang, Dong Hyeon Kwon, Tae-Gon Kim, Jin-Ho Ahn, Byung-Hoon Lee, Jin-Goo Park, Hwan Seok Seo, Hee Bom Kim

Proceedings Volume PC12293, PC1229308 (2022) https://doi.org/10.1117/12.2641583

KEYWORDS: Pellicles, Particles, Extreme ultraviolet, Safety, Particle systems, Particle contamination, Atomic force microscopy, Silica, Optical microscopes, Nanomanipulation

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years