Hyunjoo Lee
Photomask Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Profile Summary

Photomask E-beam, Laser writer manager
Photomask Cleaning senior manager
Photomask Repair senior manager
Photomask Bake,Dev senior manager
Photomask Dry etch senior manager
Photomask Technical Innovation Leader
Publications (5)

Proceedings Article | 26 August 2024 Paper
Proceedings Volume 13177, 131770N (2024) https://doi.org/10.1117/12.3032128
KEYWORDS: Photomasks, Sensors, Manufacturing, Vacuum, Data analysis, Semiconducting wafers, Extreme ultraviolet, Particles, Data modeling, Vacuum chambers

Proceedings Article | 1 December 2022 Paper
Proceedings Volume 12293, 1229303 (2022) https://doi.org/10.1117/12.2641750
KEYWORDS: Image processing, Photomasks, Inspection, Extreme ultraviolet, Coating, Image segmentation, Image quality, Etching, Sensors, Optical inspection

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 118550A (2021) https://doi.org/10.1117/12.2599020
KEYWORDS: Particles, Inspection, Photomasks, Digital image processing, Image processing, Sensors, Extreme ultraviolet, Process control, Manufacturing, Plasma

Proceedings Article | 8 November 2012 Paper
Proceedings Volume 8522, 852228 (2012) https://doi.org/10.1117/12.964098
KEYWORDS: Vestigial sideband modulation, Photomasks, Associative arrays, Contamination, Electron beams, Beam shaping, Reliability, Calibration, Data modeling, Semiconductors

Proceedings Article | 23 February 2012 Paper
Kyoungho Ha, Dongjae Shin, Hyunil Byun, Kwansik Cho, Kyoungwon Na, Hochul Ji, Junghyung Pyo, Seokyong Hong, Kwanghyun Lee, Beomseok Lee, Yong-hwack Shin, Junghye Kim, Seong-gu Kim, Insung Joe, Sungdong Suh, Sanghoon Choi, Sangdeok Han, Yoondong Park, Hanmei Choi, Bongjin Kuh, Kichul Kim, Jinwoo Choi, Sujin Park, Hyeunsu Kim, Kiho Kim, Jinyong Choi, Hyunjoo Lee, Sujin Yang, Sungho Park, Minwoo Lee, Minchang Cho, Saebyeol Kim, Taejin Jeong, Seokhun Hyun, Cheongryong Cho, Jeong-kyoum Kim, Hong-gu Yoon, Jeongsik Nam, Hyukjoon Kwon, Hocheol Lee, Junghwan Choi, Sungjin Jang, Joosun Choi, Chilhee Chung
Proceedings Volume 8267, 82670F (2012) https://doi.org/10.1117/12.912794
KEYWORDS: Interfaces, Modulators, Waveguides, Photodiodes, Silicon, Optical components, Oxides, Optical interconnects, Eye, Crystals

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