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Joo Eon Oh
at Pohang Univ of Science and Technology
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Publications (1)
Proceedings Article | 24 February 2009 Paper
Enhancement of cleaning efficiency by geometrical confinement of plasma expansion in the laser-shock cleaning process for nanoscale contaminant removal
Deoksuk Jang, Joon Ho Oh, Jong-Myoung Lee, Dongsik Kim
Proceedings Volume 7201, 72010U (2009) https://doi.org/10.1117/12.813629
KEYWORDS: Particles, Laser induced plasma spectroscopy, Plasma, Quartz, Wave plates, Laser induced breakdown spectroscopy, Laser induced damage, Silicon, Picosecond phenomena, Reflectors
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