Mr. Jianyuan Ma Profile

Jianyuan Ma

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 19 November 2021 Paper

X-ray scatterometry using deep learning

Shuo Liu, Tianjuan Yang, Jiahao Zhang, Jianyuan Ma, Shiyuan Liu, Xiuguo Chen

Proceedings Volume 12059, 120591M (2021) https://doi.org/10.1117/12.2612769

KEYWORDS: Data modeling, Statistical modeling, Scattering, Diffraction, X-rays, Scatterometry, Convolution, Inverse problems, Metrology, Optics manufacturing

Read Abstract +

Proceedings Article | 19 November 2021 Paper

Simulations of the transmission small angle x-ray scattering for three-dimensional architectures

Tianjuan Yang, Jiahao Zhang, Jianyuan Ma, Shiyuan Liu, Xiuguo Chen

Proceedings Volume 12059, 120591K (2021) https://doi.org/10.1117/12.2612253

KEYWORDS: Scattering, 3D metrology, Diffraction, X-rays, 3D modeling, Computer architecture, Metrology, Transmission electron microscopy

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years