Dr. Jing Wang Profile

Dr. Jing Wang

at Univ of Minnesota

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Publications (2)

Proceedings Article | 28 May 2009 Paper

Nanoparticle contamination control for EUVL-technology: especially for photomasks in carriers and scanners

Heinz Fissan, Christof Asbach, Thomas A. Kuhlbusch, Jing Wang, David Y. Pui, Se-Jin Yook, Jung Kim

Proceedings Volume 7364, 73640N (2009) https://doi.org/10.1117/12.821654

KEYWORDS: Particles, Photomasks, Atmospheric particles, Contamination, Scanners, Extreme ultraviolet lithography, Nanoparticles, Pellicles, Atmospheric modeling, Protactinium

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Proceedings Article | 22 March 2008 Paper

Controlled deposition of NIST-traceable nanoparticles as additional size standards for photomask applications

Jing Wang, David Pui, Chaolong Qi, Se-Jin Yook, Heinz Fissan, Erdem Ultanir, Ted Liang

Proceedings Volume 6922, 69220G (2008) https://doi.org/10.1117/12.756741

KEYWORDS: Particles, Silica, Atmospheric particles, Inspection, Quartz, Gold, Calibration, Standards development, Aerosols, Photomasks

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