Dr. Joachim Heil Profile

Dr. Joachim Heil

at Vistec Semiconductor Systems GmbH

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Author

Publications (6)

Proceedings Article | 20 October 2005 Paper

DUV-microscope objectives: technology driver that forces the production to switch from the micrometer scale to the nanometer scale

Thomas Sure, Tobias Bauer, Joachim Heil, Joachim Wesner

Proceedings Volume 5965, 59651H (2005) https://doi.org/10.1117/12.625009

KEYWORDS: Objectives, Monochromatic aberrations, Wavefronts, Tolerancing, Microscopes, Imaging systems, Interferometers, Deep ultraviolet, Manufacturing, Optics manufacturing

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Proceedings Article | 22 October 2004 Paper

Improved polarization ray tracing of thin-film optical coatings

Joachim Wesner, Frank Eisenkramer, Joachim Heil, Thomas Sure

Proceedings Volume 5524, (2004) https://doi.org/10.1117/12.559971

KEYWORDS: Thin films, Phase shifts, Polarization, Optical coatings, Ray tracing, Geometrical optics, Thin film coatings, Reflection, Optical design, Interfaces

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Proceedings Article | 26 February 2004 Paper

New tools for high-precision positioning of optical elements in high-NA microscope objectives

Joachim Heil, Tobias Bauer, Willi Mueller, Thomas Sure, Joachim Wesner

Proceedings Volume 5252, (2004) https://doi.org/10.1117/12.512835

KEYWORDS: Objectives, Monochromatic aberrations, Point spread functions, Deep ultraviolet, Optical components, Microscopes, Metrology, Interferometry, Spherical lenses, Interferometers

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Proceedings Article | 22 December 2003 Paper

Microscope objective production: on the way from the micrometer scale to the nanometer scale

Thomas Sure, Joachim Heil, Joachim Wesner

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.505803

KEYWORDS: Objectives, Wavefronts, Microscopes, Monochromatic aberrations, Interferometers, Point spread functions, Tolerancing, Deep ultraviolet, Stars, Lens design

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Proceedings Article | 16 October 2002 Paper

Reconstructing the pupil function of microscope objectives from the intensity PSF

Joachim Wesner, Joachim Heil, Thomas Sure

Proceedings Volume 4767, (2002) https://doi.org/10.1117/12.451320

KEYWORDS: Point spread functions, Objectives, Wavefronts, Reconstruction algorithms, Microscopes, Signal to noise ratio, Error analysis, Monochromatic aberrations, Fourier transforms, Interferometry

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Proceedings Article | 5 December 2001 Paper

Requirements for the design and production of high numerical aperture objectives for 4-Pi confocal microscopy

Thomas Sure, Joachim Wesner, Joachim Heil

Proceedings Volume 4441, (2001) https://doi.org/10.1117/12.449568

KEYWORDS: Objectives, Confocal microscopy, Microscopes, Wavefronts, Diffraction, Luminescence, Chromatic aberrations, Point spread functions, Colorimetry, Product engineering

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Showing 5 of 6 publications

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