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Josef Kouba
at Louisiana State Univ
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Author
Publications (1)
Proceedings Article | 30 December 2003 Paper
Fabrication of large-area x-rays masks for UDXRL on beryllium using thin film UV lithography and x-ray backside exposure
Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531598
KEYWORDS: Gold, X-rays, Photomasks, X-ray lithography, Beryllium, Plating, Ultraviolet radiation, Lithography, Photoresist materials, Photoresist processing
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