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Julia Stark
at Heidelberg Instruments Nano AG
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Publications (1)
Proceedings Article | 9 April 2024 Poster + Paper
Patterning processes with thermally decomposable polymers
Jayna Sheats, Matthew Robinson, Natalia Steinschreiber, Michele Fromel, Benjamin Bachman, Nicholas Hendricks, Julia Stark
Proceedings Volume 12956, 129560T (2024) https://doi.org/10.1117/12.3012601
KEYWORDS: Polymers, Photoacid generators, Optical lithography, Ablation, Laser ablation, Film thickness, Chemistry, Pulsed laser operation, Photoresist materials, Lithography
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