Dr. Juliette van der Meer Profile

Dr. Juliette van der Meer

at Bruker AXS GmbH

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Publications (1)

SPIE Journal Paper | 2 August 2023 Open Access

Model-free measurement of lateral recess in gate-all-around transistors with micro hard-X-ray fluorescence

Janusz Bogdanowicz, Yusuke Oniki, Karine Kenis, Pallavi Puttarame Gowda, Hans Mertens, Basel Shamieh, Yonatan Leon, Matthew Wormington, Juliette Van der Meer, Anne-Laure Charley

JM3, Vol. 22, Issue 03, 034001, (August 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.034001

KEYWORDS: Germanium, Gallium arsenide, Transmission electron microscopy, Semiconducting wafers, Nanosheets, X-rays, Silicon, Etching, Transistors, Fluorescence

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