In this study, we manufactured a 460 mm long deformable mirror which has 28 channel-PZTs on the ellipse pre-figured mirror and flat back surfaces. We evaluated the LTP target ellipse shape measurement result and the "junction" effect by applying voltage to each electrode.
The hard X-ray adaptive mirror optics will play an important role at next generation light sources. A dynamic mirror bender with capacitive sensor array as an in-situ mirror profiler is used for initial test for hard x-ray zoom optics has been designed and constructed. Previous work showcases the dynamic control of this elliptically bent hard X-ray mirror through applying a combination of neural networks algorithm and feedback control. In this paper, we present further control enhancement with machine learning techniques through optimization of the number and placement of the capacitive sensors and new sensor calibration with video-based coordinate measuring machine.
KEYWORDS: Mirrors, Hard x-rays, Machine learning, Control systems, Sensors, Profilometers, Feedback control, In situ metrology, Adaptive optics, Control systems design
This article showcases the high-resolution control of an elliptically bent hard X-ray mirror optics at the Advanced Photon Source. The mirror uses a compact laminar flexure bending mechanism to achieve elliptical shapes covering a large range of focal distances. An array of capacitive sensors are used as a surface profiler for in-situ monitoring of the mirror shape. Machine learning and control techniques were used to change the mirror shape and focus the incident X-ray at predefined focal planes. The mirror surface shape error can be controlled to be within 40 nm rms with high repeatability. This technique gives the capability to focus incident X-ray beam within a range of focal distances corresponding to shape deformation range of a mirror optics. This work would be beneficial for controlling similar adaptive optics for multiple adaptive optics systems.
Mirror-based zoom optics systems can offer variable focal spot sizes over a wide range, which is essential for coherent nanoprobe beamlines, such as the proposed Atomic beamline in the Advanced Photon Source (APS) upgrade project. The success of the zoom mirror system in the nano-focusing regime requires the development of high-precision deformable mirrors, in-situ surface profilers and wavefront sensors, and advanced feedback control system. A prototype 1-D zoom mirror system consists of two vertical focusing mirrors was designed, assembled, and tested at the APS 1-BM beamline. The system consists of a bender-based mirror with a capacitive-sensor- array-based real-time mirror profiler, a bimorph adaptive mirror, and a grating interferometer for the wavefront monitoring. In this work, we present the design and test results of the prototype system demonstrating its zoom focusing capability.
Using a compact laminar overconstrained flexure bending mechanism and a capacitive sensor array, a precision compact mirror bending mechanism for 300-mm long hard x-ray mirror has been designed and constructed to perform initial test for x-ray zoom optics as a part of an Argonne Laboratory-Directed Research and Development project at the Advanced Photon Source. A Finite Element Model (FEM) of the mirror bender was created with commercial simulation software. An iterative process of simulations were run to predict accurate bending parameters for the flexure bending mechanism.The FEM simulation demonstrated a result of an elliptically bent trapezoid mirror surface that fit with desired elliptical mirror profile within ±20 nanometers over 86% of the mirror’s measured length. The iteration process of model refinement, results of the finite element simulations, and preliminary test of the capacitive sensor array are discussed in this paper.
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