CONFERENCE PROCEEDINGS
Advanced Search
Liang Zhang
at Nanchang Hangkong University
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 28 February 2017 Paper
Improved image quality of digital lithography using modified particle swarm optimization algorithm
Liang Zhang, ZhaoJun Shi, Qishen Li
Proceedings Volume 10256, 102562J (2017) https://doi.org/10.1117/12.2257457
KEYWORDS: Image quality, Lithography, Particles, Particle swarm optimization, Digital micromirror devices, Distortion, Optimization (mathematics), Resolution enhancement technologies, Source mask optimization, Image enhancement
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top