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Ludovico Cademartiri
at Iowa State Univ of Science and Technology
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Author
Publications (2)
SPIE Journal Paper | 6 September 2016
Optics-free, plasma-based lithography in inorganic resists made up of nanoparticles
Santosh Shaw, Kyle Miller, Julien Colaux, Ludovico Cademartiri
JM3, Vol. 15, Issue 03, 031607, (September 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.031607
KEYWORDS: Plasma, Lithography, Nanoparticles, Nanocrystals, Photomasks, Plasma etching, Polymers, Etching, Copper, Hybrid fiber optics
Proceedings Article | 21 March 2016 Paper
Optics-free lithography on colloidal nanocrystal assemblies
Santosh Shaw, Kyle Miller, Julien Colaux, Ludovico Cademartiri
Proceedings Volume 9779, 97791J (2016) https://doi.org/10.1117/12.2218792
KEYWORDS: Plasma, Nanocrystals, Lithography, Etching, Plasma etching, Nanoparticles, Nanolithography, Photomasks, Zirconium dioxide
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