Mr. Luis Aguirre Profile

Luis Aguirre

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Manufacturing and metrology of 3D holographic structure nanopatterns in roll-to-roll fabrication

Barbara Groh, Kwon Sang Lee, Luis Arturo Aguirre, Michael Cullinan, Chih-Hao Chang

Proceedings Volume 12956, 1295609 (2024) https://doi.org/10.1117/12.3010004

KEYWORDS: Metrology, Manufacturing, Photomasks, Atomic force microscopy, 3D metrology, Lithography, Holography, Nanostructures, Control systems, Fabrication

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