Mr. Maikel Goosen Profile

Maikel Goosen

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 26 March 2019 Paper

Analyze line roughness sources using power spectral density (PSD)

Lingling Pu, Teng Wang, Thomas Huisman, Ruben Maas, Maikel Goosen, Harm Dillen, Philippe Leray, Wei Fang

Proceedings Volume 10959, 109592W (2019) https://doi.org/10.1117/12.2516570

KEYWORDS: Scanning electron microscopy, Line edge roughness, Semiconducting wafers, Monte Carlo methods, Image segmentation, Semiconductors, Extreme ultraviolet, Optical simulations, Solids, Metrology

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Proceedings Article | 20 March 2018 Paper

In-resist pattern shift metrology

Anita Bouma, Bart Smeets, Lei Zhang, Thuy T. Vu, Peter de Loijer, Maikel Goosen, Willem van Mierlo, Wendy Liebregts, Bart Rijpers

Proceedings Volume 10587, 105871G (2018) https://doi.org/10.1117/12.2304364

KEYWORDS: Overlay metrology, Diffraction, Wavefront aberrations, Optical aberrations

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