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Dr. Marco Amiotti
CEO at SAES Getters SpA
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Publications (4)
Proceedings Article | 21 September 2011 Paper
Novel edge sealing getter tape: ultra long breakthrough time and high mechanical properties at high temperature
Proceedings Volume 8112, 81120E (2011) https://doi.org/10.1117/12.893284
KEYWORDS: Glasses, Solar cells, Temperature metrology, Humidity, Data modeling, Thin films, Climatology, Photovoltaics, Dielectrics, Copper indium gallium selenide
Proceedings Article | 23 December 2003 Paper
Chemical treatment of getter films on wafers prior to vacuum packaging
Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.525099
KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Silicon, Wafer bonding, Packaging, Glasses, Particles, Industrial chemicals, Carbon monoxide, Silicon films
Proceedings Article | 16 January 2003 Paper
New getter configuration at wafer level for assuring long-term stability of MEMS
Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472718
KEYWORDS: Microelectromechanical systems, Semiconducting wafers, Silicon, Carbon monoxide, Zirconium, Glasses, Ceramics, Reliability, Scanning electron microscopy, Particles
Proceedings Article | 19 November 1993 Paper
Characterization of InP/GaInAs superlattices by spectroscopic ellipsometry
Marco Amiotti, Giorgio Guizzetti, Maddalena Patrini, Gunnar Landgren
Proceedings Volume 1985, (1993) https://doi.org/10.1117/12.162777
KEYWORDS: Superlattices, Spectroscopic ellipsometry, Dielectrics, Metals, Vapor phase epitaxy, Optical testing, Temperature metrology, Modeling, Oxides, Interfaces
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