Dr. Margarita Zakharova
at Deutsches Elektronen-Synchrotron DESY
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 April 2019 Paper
M. Zakharova, S. Reich, A. Mikhaylov, V. Vlnieska, Marcus Zuber, Sabine Engelhardt, T. Baumbach, D. Kunka
Proceedings Volume 11032, 110320U (2019) https://doi.org/10.1117/12.2520723
KEYWORDS: Photomasks, Visibility, X-rays, Sensors, Gold, Photoresist materials, X-ray imaging, Phase contrast, Lithography

Proceedings Article | 26 April 2019 Presentation + Paper
Andrey Mikhaylov, Stefan Reich, Anton Plech, Margarita Zakharova, Vitor Vlnieska, Danays Kunka
Proceedings Volume 11032, 1103208 (2019) https://doi.org/10.1117/12.2520687
KEYWORDS: X-rays, X-ray imaging, Sensors, Visibility, Diamond, Absorption, Printing, Refractive index, Manufacturing, Scanning electron microscopy

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