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Mengqing Xu

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Proceedings Article | 19 December 2022 Paper

Detection and evaluation of surface defect for large-size grating

Xingxue Li, Bin Zhou, Mengqing Xu, Yuda Chen, Yihan Wang, Jin Wang, Changhe Zhou

Proceedings Volume 12318, 123180X (2022) https://doi.org/10.1117/12.2642142

KEYWORDS: Diffraction gratings, Defect detection, Optical inspection

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In view of the fact that the current research of detection technology for large-size grating surface defect was very little, this paper builds a set of grating defect detection device based on the principle of darkfield imaging. The scheme includes three subsystems: displacement system, monochrome light illumination system and image acquisition system. When the displacement system drives the motion stage to move, the monochromatic light illumination system and the image acquisition system jointly complete the acquisition of the grating surface images. In this study, the surface of the diffraction grating with 170×170mm2 was detected for defects, and the statistical data of different defects is given. Experimental results show that, the device meets the needs of defect detection and evaluation on large-size grating surfaces and the mechanical structure is simple and compact, which has the great potential for large-scale detection.

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