Dr. Miguel Jesús Sicilia-Cabrera Profile

Dr. Miguel Jesús Sicilia-Cabrera

at Wooptix SL

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Author

Publications (5)

Proceedings Article | 27 April 2023 Poster + Paper

New metrology technique for measuring the free shape of a patterned 300mm wafer held vertically

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Miguel Jesús Sicilia, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12496, 124963G (2023) https://doi.org/10.1117/12.2661903

KEYWORDS: Semiconducting wafers, Silicon, Reflection, Wavefronts, Data acquisition, Cameras, Wafer-level optics, Image sensors, Phase imaging, Metrology

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Proceedings Article | 7 December 2022 Poster + Paper

New wavefront phase sensor used for 3D shape measurements of silicon wafers

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12274, 122741F (2022) https://doi.org/10.1117/12.2645969

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Sensors, Reflectivity, 3D metrology, Wafer-level optics, Phase imaging, Image sensors

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Proceedings Article | 3 October 2022 Presentation + Paper

Wave front phase imaging for silicon wafer metrology

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12216, 1221605 (2022) https://doi.org/10.1117/12.2632499

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Reflectivity, Phase imaging, Metrology, Image sensors, Data acquisition, Wafer-level optics

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Proceedings Article | 19 February 2020 Paper

New high-resolution wave ophthalmic instrument for the characterizing ocular optics

Sergio Bonaque-González, Juan M. Trujillo-Sevilla, Oscar Casanova-González, David Carmona-Ballester, Miguel Sicilia-Cabrera, Sabato Ceruso, Jan Gaudestad, José M. Rodríguez-Ramos

Proceedings Volume 11218, 112181W (2020) https://doi.org/10.1117/12.2548595

KEYWORDS: Sensors, Eye, Wavefront sensors, Image resolution, Wavefronts, Error analysis, Ophthalmology, Distance measurement, Actuators, Diagnostics

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Proceedings Article | 14 May 2019 Paper

Calibration method applied to a tunable tensor display system

David Carmona-Ballester, Viana Guadalupe-Suárez, Juan Trujillo-Sevilla, Sergio Bonaque-González, Ricardo Oliva-García, Jose Marichal-Hernández, Miguel Sicilia-Cabrera, Lara Díaz-García, Jose Rodríguez-Ramos

Proceedings Volume 10997, 1099709 (2019) https://doi.org/10.1117/12.2518865

KEYWORDS: Calibration, LCDs, Computing systems, Lanthanum, Liquid crystals, Polarizers, Displays, Multilayers, Prototyping, Polarization

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