Dr. Ming-Chi Liao Profile

Dr. Ming-Chi Liao

at Entegris Asia LLC

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Publications (1)

Proceedings Article | 9 April 2024 Poster + Paper

Wet etch process for high-resolution DSA patterning for advanced node DRAM

Hsing-Chen Wu, Ming-Chi Liao, Eri Hirahara, Tomohiro Iwaki

Proceedings Volume 12957, 1295721 (2024) https://doi.org/10.1117/12.3011188

KEYWORDS: Etching, Polymethylmethacrylate, Picosecond phenomena, Optical lithography, Wet etching, Ultraviolet radiation, Semiconducting wafers, Chemistry, Personal protective equipment, Directed self assembly

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