Ms. Mingzhen Tang Profile

Mingzhen Tang

Student at Univ of North Carolina at Charlotte

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Proceedings Article | 14 February 2008 Paper

Observation of self-assembled periodic nano-structures induced by femtosecond laser in both ablation and deposition regimes

Mingzhen Tang, Haitao Zhang, Tsing-Hua Her

Proceedings Volume 6879, 68791J (2008) https://doi.org/10.1117/12.763790

KEYWORDS: Tungsten, Teeth, Femtosecond phenomena, Polarization, Sapphire, Scanning electron microscopy, Laser ablation, Chemical vapor deposition, Mode locking, Laser processing

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We observed the spontaneous formation of periodic nano-structures in both femtosecond laser ablation and deposition. The former involved 400-nm femtosecond pulses from a 250-KHz regenerated amplified mode-locked Ti:sapphire laser and periodic nanocracks and the nano-structure are in the form of periodic nanocracks in the substrate, the latter applied an 80-MHz mode-locked Ti:sapphire oscillator with pulse energy less than half nanojoule in a laser-induced chemical vapor deposition configuration and tungsten nanogratings grow heterogeneously on top of the substrates. These two observed periodic nanostructures have opposite orientations respecting to laser polarization: the periodic nanocracks are perpendicular to, whereas the deposited tungsten nanogratings are parallel to laser polarization direction. By translating the substrate respecting to the laser focus, both the periodic nanocrack and tungsten nanograting extend to the whole scanning range. The deposited tungsten nanogratings possess excellent uniformity on both the grating period and tooth length. Both the attributes can be tuned precisely by controlling the laser power and scanning speed. Furthermore, we discovered that the teeth of transverse tungsten nanogratings are self aligned along their axial direction during multiple scanning with appropriate offset between scans. We demonstrate the feasibility of fabricating large-area one-dimensional grating by exploiting such unique property. These distinct phenomena of nanocracks and tungsten nanogratings indicate different responsible mechanisms.

Proceedings Article | 13 March 2007 Paper

Periodic nanoripple generated by femtosecond laser beam in LCVD system

Mingzhen Tang, Haitao Zhang, Jerry McCoy, Tsing-Hua Her

Proceedings Volume 6462, 64620T (2007) https://doi.org/10.1117/12.700745

KEYWORDS: Tungsten, Femtosecond phenomena, Sapphire, Polarization, Scanning electron microscopy, Glasses, Metals, Refractive index, Chemical vapor deposition, Dielectrics

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We demonstrate deposition of periodic tungsten nanoripple on different substrate using a single 400nm femtosecond laser beam at room temperature. The laser beam generated by frequency doubling the output from mode-locked 80MHz Ti: sapphire oscillator was applied in a laser-induced chemical vapor deposition configuration, in which tungsten hexacarbonyl was used as precursor. The deposition strongly depended on laser polarization. With linearly polarized light, periodic ripple structure with willow-leaf shape was formed inside the exposure area. The ripple orientation was found parallel to the laser polarization direction. Affects of laser power and exposure time on ripple formation were investigated. By translating the substrate with respective to the laser beam, longitudinal or transverse grating structure was observed. The period of this grating structure is about 150nm on sapphire, and the orientation is parallel to laser polarization. Simply by programming the translation of the substrate, large area patterns and other patterns such as circle and characters were formed. Similar ripple and grating structures observed on all the substrates we investigated, including insulators, semiconductors and metals, implies that ripple formation might be a universal phenomenon. Considering the simplicity of this process and material flexibility of laser CVD, this technique may provide a novel costeffective patterning method to produce periodic subwavelength nanostructures of a wide range of materials on many substrates.

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