Ms. Minwoo Kim Profile

Minwoo Kim

at Hanyang Univ

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Publications (2)

Proceedings Article | 12 October 2021 Presentation + Paper

Optimal phase shift and reflectance for high numerical aperture EUV phase shift mask

In-Hwa Kang, Jang-Gun Park, Min-Woo Kim, Jun-Hyeong Lee, Hye-Keun Oh

Proceedings Volume 11855, 118550P (2021) https://doi.org/10.1117/12.2602035

KEYWORDS: Reflectivity, Photomasks, Phase shifts, Diffraction, Extreme ultraviolet, Image processing, Optical lithography, Image quality, Extreme ultraviolet lithography, Absorption

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Proceedings Article | 16 October 2017 Paper

Lifetime impact on residual stress of EUV pellicle

Min-Woo Kim, Sung-Gyu Lee, Eun-Sang Park, Hye-Keun Oh

Proceedings Volume 10450, 104501O (2017) https://doi.org/10.1117/12.2280692

KEYWORDS: Pellicles, Silicon carbide, Silicon, Ruthenium, Extreme ultraviolet, Finite element methods, Extreme ultraviolet lithography, Manufacturing, Silica, Photomasks

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