The paper present the design and the construction of a novel 3-D micromirror optical scanner for use in a
swept-source optical coherence tomography (SS-OCT) that is based on external-cavity tunable lasers. The 3D
rotating octagonal micromirror consists of a rotary platform, onto which the micromirrors are assembled in
an octagonal configuration. The 3D optical scanner was constructed in a two stage process. It was first
fabricated using surface micromachining PolyMUMPs fabrication process, and then assembled using a
robotic micromanipulator system. The microassembly process is a robotic-based process based on the PKMIL
system.The methodology to construct the micromirror and the design of the micromirror parts, and the results
of the assembly process are presented, along with examples of prototype of the 3D micromirrors.
This paper describes a novel design for a variable optical delay line (ODL) based on modified version of a
recently developed MEMS-based 3-D rotating inclined micromirror (3DRIM). The 3DRIM is created by
assembling a micromirror onto the top of a rotary comb-drive motor. The comb-drive motor is able to
achieve a few degrees of rotation. The new ODL architecture uses two such 3DRIMs located inside a
rectangular cavity with mirrored walls. Light from an input fiber is redirected by the 3DRIMs, and caused to
reflect within the cavity a number of times, depending on the rotational angle of the 3DRIMs. In this way, the
ODL can achieve variable optical delays of up to 3.7 nsec.
A robotic-based microassembly process has been successfully applied to the construction of a novel micromirror
design for use in optical switching. This paper is devoted to the description of a modified microassembly
technique to construct a 3-D rotating inclined micromirror (3DRIM) that incorporate large micromirrors. The
microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system.
The new modified assembly technique uses three supporting microparts: Two support posts and one cross-support
post. Details of the assembly process to construct the micromirror and the design of the microparts are
described. The results of the assembly process are presented, along with examples of prototype 3DRIMs. The
3DRIM is used as a building element for 1×N optical switching systems and for N ×M optical cross-connects.
In this paper we report a new design technique to optimize the driving torque of electrostatic side drive micromotors
based on a new technique of rotor-poles-shaping. By reshaping the rotor pole from it regular pie
shape, we can modify the distributions and directions of electric field in the gap between rotor and stator poles.
Hence, the tangential electrostatic force component exerted on the rotor poles, responsible for driving torque, is
maximized. A 2D parametric finite element model using ANSYS APDL programming language is developed for
the optimization of the rotor pole shape. The finite element model uses a potential periodic boundary condition
to simulate only one micromotor sector. Simulation results show an increase of the driving torque up to 48.75%.
A robotic-based microassembly process has been successfully applied to the construction of a novel
micro-mirror design for use in optical switching. This paper is devoted to the description of the
microassembly process used to construct the 3D micro-mirror. The microassembly process is based upon the
PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. Details of the assembly process
include, the methodology to construct the micro-mirror, the design of the micro-mirror parts, and the design
of the tools (microgrippers) that are mounted to the robot to handle the micro-parts. The results of the
assembly process are presented, along with examples of prototype 3D micro-mirrors. The entire 3D micromirror
consists of a novel electro-static rotary motor, onto which the 3D mirror structure is assembled. The
3D micro-mirror is used as a building element for 1 N optical switching systems and for N×M optical crossconnects.
In this paper, we present a series based solution of plane wave scattering from multiple Isosceles Right Triangle (IRT) grooves in perfect conducting plane. Scattered field in the upper half plane is expressed in a Fourier integral form. Fields in the IRT grooves are formulated as a summation of modal fields similar to the modal fields in IRT waveguide. A summation of a complete set of plane wave in the IRT groove is used to find a closed form of the fields in the IRT grooves. Matching the fields at the interface between the IRT grooves and the upper half plane provide a Fourier expansion summation form of the angular spectrum of the scattered field. The method is rigorous, robust, and provides an analytical form of the scattered field. Simulation results for far and near-fields will be shown for general oblique incident angle with various groove dimensions. Effects of the number of grooves on the scattered field are studied. The effect of ratio between the groove opening and the period between grooves is studied.
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