Prof. Ndaona Chokani Profile

Prof. Ndaona Chokani

Senior Scientist at ETH Zurich

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Author

Publications (4)

Proceedings Article | 23 March 2010 Paper

Tin ion and neutral dynamics within an LPP EUV source

Bob Rollinger, Oran Morris, Ndaona Chokani, Reza Abhari

Proceedings Volume 7636, 76363F (2010) https://doi.org/10.1117/12.846557

KEYWORDS: Ions, Tin, Extreme ultraviolet, Plasma, Sputter deposition, Optical simulations, Particles, Pulsed laser operation, Molybdenum, Monte Carlo methods

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Proceedings Article | 20 March 2010 Paper

Normal incidence collector for LPP sources with integrated debris mitigation

Andrea Giovannini, Franz Dieterich, Ian Henderson, Ndaona Chokani, Reza Abhari

Proceedings Volume 7636, 763613 (2010) https://doi.org/10.1117/12.846548

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Monte Carlo methods, Plasmas, Mica, Manufacturing, Mirrors, Particles, Temperature metrology, Cooling systems

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Proceedings Article | 18 March 2009 Paper

Kinetic simulation of debris from an LPP EUV source

Bob Rollinger, Andrea Giovannini, Davide Bleiner, Ndaona Chokani, Reza Abhari

Proceedings Volume 7271, 72712W (2009) https://doi.org/10.1117/12.814150

KEYWORDS: Ions, Particles, Extreme ultraviolet, Mirrors, Plasma, Tin, Near field optics, Extreme ultraviolet lithography, Atomic, molecular, and optical physics, Reflectivity

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Proceedings Article | 27 March 2008 Paper

Characteristics of a minimum-debris optimum conversion efficiency tin-based LPP source

Bob Rollinger, Davide Bleiner, Ndaona Chokani, Reza Abhari

Proceedings Volume 6921, 692110 (2008) https://doi.org/10.1117/12.771641

KEYWORDS: Spherical lenses, Extreme ultraviolet, Ions, Plasmas, Pulsed laser operation, Optical simulations, Liquids, Solids, Nd:YAG lasers, Atomic, molecular, and optical physics

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