A stable optical resonator comprising a spherical rear mirror with a phase step of λ/2 at its center and a flat output coupler promises to produce a beam with very low diffraction. Based on this premise, a phase step mirror is fabricated on oxygen-free high-conductivity copper substrate using single-point diamond turning method for use in kilowatt-class CO 2 laser. The fabrication technique and subsequent metrology measurements of the optical component, e.g., surface profile error and surface finish, are discussed.
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